Download e-book for iPad: A guide to hands-on MEMS design and prototyping by Joel A. Kubby
By Joel A. Kubby
Even if you're a scholar taking an introductory MEMS path or a working towards engineer who must wake up to hurry speedy on MEMS layout, this sensible advisor offers the hands-on event had to layout, fabricate and attempt MEMS units. you'll methods to use foundry multi-project fabrication approaches for inexpensive MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online
''Whether you're a pupil taking an introductory MEMS path or a working towards engineer who must wake up to hurry fast on MEMS layout, this useful advisor presents the hands-on adventure had to layout, fabricate and try out MEMS units. you'll tips on how to use foundry multi-project fabrication approaches for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a number of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with strategies to the layout problem difficulties and a range of case experiences of MEMS devices''-- Read more... desktop generated contents word: 1. creation; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and attempt; eight. From prototype to product: MEMS deformable mirrors for adaptive optics
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Extra info for A guide to hands-on MEMS design and prototyping
Top) Transverse motion squeezes the air. (Middle) Lateral motion gives rise to a viscous force. (Bottom) Rotational motion causes both squeezed film dampening and viscous dampening. (Reprinted with permission from Prof. 10 Accelerometer 49 between a released member and the substrate, like a piston; move through air, like a wing; or force air from one position to another, like a compressor. 17 (right). If the air is compressed rather than displaced, the air film can act as a spring. 10 Accelerometer An accelerometer is essentially a mass on a spring.
J. Bishop, Stress-induced curvature engineering in surface micromachined devices, SPIE 3680, pp. 984–993 (1999). T. S. T. Howe, Supercritical carbon dioxide drying of microstructures, Proc. Transducers ’93 (Yokohama), pp. 296–299 (1993). J. M. Sarro, Surface versus bulk micromachining: The contest for suitable applications, J. Micromechanical Microengineering 8, pp. 45–53 (1998). J. M. G. R. W. E. W. Rogala, R. J. G. Darrin, Development, test and evaluation of MEMS micro-mirrors for free-space optical communications, Proc.
Juneau, Advanced wavefront correction technology for the next generation of adaptive optics equipped ophthalmic instrumentation, Proc. SPIE 5688, pp. 125–132 (2005). 18 R. Wood, V. Dhuler, and E. Hill, A MEMS variable optical attenuator, Proc. IEEE/LEOS Int’l Conf. Opt. MEMS, Kauai, HI, Aug. 2000, pp. 121–222 (2000). A. Kubby on behalf of the MOEMS Manufacturing Consortium, Hybrid integration of light emitters and detectors with SOI-based micro-opto-electro-mechanical (MOEMS) systems, Proc. J. A.
A guide to hands-on MEMS design and prototyping by Joel A. Kubby